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4th International Symposium on DSA, November 11-13, 2018, Sapporo Park
Hotel, Sapporo, Japan |
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▸Materials (BCP, surface control layers, additives, ...)
▸Processing
▸DSA-friendly design and OPC
▸Etch ▸Simulations
▸2D and 3D Metrology
▸Pattern placement
▸Integration
▸DSA extendibility
We aim for a mix of industrial and academic contributions to tackle practical
as well as fundamental aspects of the technology. |
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Copyright(C) Since 2017, DSA Symposium All Rights Reserved. |
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