4th International Symposium on DSA, November 11-13, 2018, Sapporo, Japan
             





▸Materials (BCP, surface control layers, additives, ...)
▸Processing
▸DSA-friendly design and OPC
▸Etch ▸Simulations
▸2D and 3D Metrology
▸Pattern placement
▸Integration
▸DSA extendibility


We aim for a mix of industrial and academic contributions to tackle practical as well as fundamental aspects of the technology.


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